Provided are a gas sensor, which is super small to be arranged for separated gas piping in semiconductor manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for such gas measuring system. The gas sensor is provided with a gas detecting element, which has a dielectric semiconductor and changes conductivity corresponding to gas adsorption status; a capacitance section connected in series to the gas detecting element; and a pair of electrodes respectively conneced to electrical end sections of the electrical elements, including the gas detection element and the capacitance section. The gas sensor detects the gas adsorption status of the gas detecting element, based on electrical response that varies depending a voltage which is applied to the pair of electrodes with periodical changes, including reversal of polarity.

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