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Micro Vacuum Gauge
The patent discloses a technology to expand the lower measurable range for micro thermal vacuum gauge by using a material with a lower emissivity or with a higher transmittance as a freestanding heated structure.
A micro vacuum gauge comprises a substrate, a floating structure which is held
above the substrate by a support structure extending from the substrate in such a state that the floating structure is thermally isolated from the substrate, a heat generation element which is disposed on the floating structure and generates heat, and a temperature sensor which is disposed on the floating structure and measures the difference in temperature between the substrate and the floating structure. A second member having a radiation rate lower than that of a first member surrounding the heat generation element and the temperature sensor is so joined to the first member as to be provided on at least the surface of the floating structure. To access the rest of the information on this page,
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